TiN의 Cu 확산방지막 특성 및 그 특성 평가 방법에 관한 연구The properties and the characterization methods of TiN as a barrier against Cu diffusion
- Advisors
- 박종욱researcher; Park, Chong-Ookresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106174/325007 / 000943402
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ iii, 65 p. ]
- Keywords
확산방지막; 배선재료; 금속공정; TiN; CV Measurment; Diffusion Barrier; Cu
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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