Titanium isopropoxide와 ammonia를 이용하는 촉매화학기상증착법에 의한 $TiO_2$ 박막 형성에 관한 연구A study on the formation of $TiO_2$ thin films using titanium isopropoxide and ammonia by catalytic CVD
- Advisors
- 강상원researcher; Kang, Sang-Wonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 169591/325007 / 000955348
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.2, [ viii, 104 p. ]
- Keywords
피리딘; 암모니아; 산화 티탄; 촉매 기상화학증착; 루타일; rutile; Pyridine; Ammonia; TiO2; Catalytic CVD
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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