실리콘 팁의 코발트 실리사이드와 질화물 코팅에 의한 전계 방출 및 파괴 거동에 관한 연구 = A study on the field emission and failure behaviors of silicon tip arrays with Co-Silicide and Nitride coating layers

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Advisors
안병태researcherAhn, Byung-Taeresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
2001
Identifier
169541/325007 / 000975412
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 2001.8, [ xii, 204 p. ]

Keywords

전계 방출; 질화물; 코발트 실리사이드; 실리콘 팁; 파괴 거동; failure behaviors; field emission; Nitride; Co-Silicide; silicon tip

URI
http://hdl.handle.net/10203/50429
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=169541&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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