마이크로웨이브 플라즈마 화학증착법에 의한 다이아몬드 박막의 Heteroepitaxy 성장에 관한 연구The study on the heteroepitaxial growth of diamond films synthesized by microwave plasma enhanced chemical vapor deposition
- Advisors
- 이재영; Lee, Jai-Young
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 112997/325007 / 000925074
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1997.2, [ v, 164 p. ]
- Keywords
음극바이어스; 핵생성; 헤테로에피텍시 성장; 다이아몬드; 플라즈마 화학증착; CVD plasma; Negative bias; Nucleation; Heteroepitaxy growth; Diamond
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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