Ru 전구체의 열분해 메카니즘과 Ru 박막의 화학기상 증착Thermal decomposition mechanism of Ru precursor and chemical vapor deposition of Ru films
- Advisors
- 노광수researcher; No, Kwang-Sooresearcher
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2004
- Identifier
- 237608/325007 / 000995383
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ viii, 117 p. ]
- Keywords
단차 피복성; 메모리; 전극; 화학기상 증착법; 전구체; PRECURSOR; STEP COVERAGE; IR; RU; CVD
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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