DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 이원종 | - |
dc.contributor.advisor | Lee, Won-Jong | - |
dc.contributor.author | 권의희 | - |
dc.contributor.author | Kwon, Ui-Hui | - |
dc.date.accessioned | 2011-12-15 | - |
dc.date.available | 2011-12-15 | - |
dc.date.issued | 2004 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=237583&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/49778 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2004.2, [ v, 142 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | 증착 | - |
dc.subject | 플라즈마 | - |
dc.subject | 마그네트론 | - |
dc.subject | 스퍼터링 | - |
dc.subject | 전산모사 | - |
dc.subject | SIMULATION | - |
dc.subject | DEPOSITION | - |
dc.subject | PLASMA | - |
dc.subject | MAGNETRON | - |
dc.subject | SPUTTERING | - |
dc.title | 대면적 평면 마그네트론 스퍼터링 시스템의 플라즈마 발생 및 박막증착에 관한 수치적 연구 | - |
dc.title.alternative | A computational study on plasma generation and film deposition in a large-area planar magnetron sputtering system | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 237583/325007 | - |
dc.description.department | 한국과학기술원 : 신소재공학과, | - |
dc.identifier.uid | 020005019 | - |
dc.contributor.localauthor | 권의희 | - |
dc.contributor.localauthor | Kwon, Ui-Hui | - |
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