ALD 방법으로 형성된 다층 절연박막의 설계 및 특성에 관한 연구A study on the design and characterization of dielectric multilayer stacks prepared by atomic layer deposition method
- Advisors
- 박종욱researcher; Park, Chong-Ookresearcher
- Description
- 한국과학기술원 : 신소재공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2009
- Identifier
- 327749/325007 / 020055829
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 신소재공학과, 2009. 8., [ x, 133 p. ]
- Keywords
Silicon Oxide; Aluminum Oxide; Atomic layer deposition; Conduction Mechanism; Defect; 원자층 증착 방법; 전도기구; 구조결함
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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