DSpace at KOASAS: R.F. 마그네트론 스퍼터링법으로 증착 한 전도성 페로브스카이트 $LaNiO

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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Theses_Ph.D.(박사논문)

R.F. 마그네트론 스퍼터링법으로 증착 한 전도성 페로브스카이트 $LaNiO_3$ 박막의 구조 및 전기적 특성 연구Structural and electrical properties of conductive Perovskite $LaNiO_3$ thin films prepared by R.F. magnetron sputtering

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김휘산 / Kim, Hee-San

Advisors: 주웅길; Choo, Woong-Kil

Description: 한국과학기술원 : 신소재공학과,

Publisher: 한국과학기술원

Issue Date: 2005

Identifier: 249462/325007 / 020015822

Language: kor

Description: 학위논문(박사) - 한국과학기술원 : 신소재공학과, 2005.8, [ xi, 102 p ]

Keywords: 결정 구조; 강유전 박막; 스퍼터링; 산화물 전극; electrode; PZT; sputtering

URI: http://hdl.handle.net/10203/49630

Link: http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=249462&flag=dissertation

Appears in Collection: MS-Theses_Ph.D.(박사논문)

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R.F. 마그네트론 스퍼터링법으로 증착 한 전도성 페로브스카이트 $LaNiO_3$ 박막의 구조 및 전기적 특성 연구Structural and electrical properties of conductive Perovskite $LaNiO_3$ thin films prepared by R.F. magnetron sputtering

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