헬리콘파 플라즈마 발생 및 특성 연구Study of helicon wave plasma production and its characteristics
- Advisors
- 장홍영researcher; Chang, Hong-Youngresearcher
- Description
- 한국과학기술원 : 물리학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 108886/325007 / 000925078
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 물리학과, 1996.8, [ ix, 117 p. ]
- Keywords
High density plasmas; SiOF film; Helicon waves; SiOF 박막; 헬리콘파; 고밀도 플라즈마
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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