고분해능을 갖는 연 X-선 lithography용 비구면 4-반사 광학계의 설계 및 평가Optical design and evaluation of the aspherized 4 mirror optical system for high resolution for soft X-ray projection lithography
- Advisors
- 공홍진researcher; Kong, Hong-Jinresearcher
- Description
- 한국과학기술원 : 물리학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106644/325007 / 000935301
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 물리학과, 1996.2, [ v, 120 p. ]
- Keywords
Mirror system; Optical design; Soft x-ray projection lithography; Diffraction limited performance; Third order aberration
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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