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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Theses_Ph.D.(박사논문)

극자외선 마이크로 리소그라피를 위한 4-반사경 광학계의 수차해석Aberration analysis of 4-mirror optical system for deep UV micro-lithoreaphy

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김종태 / Kim, Jong-Tae
Advisors
공홍진researcher; 이상수researcher; Kong, Hong-Jinresearcher; Lee, Sang-Sooresearcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1993
Identifier
60658/325007 / 000865094
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 물리학과, 1993.2, [ iv, 73 p. ]

URI
http://hdl.handle.net/10203/47453
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60658&flag=dissertation
Appears in Collection
PH-Theses_Ph.D.(박사논문)
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