자기 부상을 이용한 웨이퍼 반송 시스템에 관한 연구A study on wafer transport system based on magnetic levitation
- Advisors
- 김수현researcher; Kim, Soo-Hyunresearcher
- Description
- 한국과학기술원 : 기계공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106250/325007 / 000943310
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학과, 1996.2, [ v, 41 p. ]
- Keywords
전자석; 영구 자석; 자기 부상; 상반 구조; Antagonistic structure; Electromagnet; Permanent magnet; Magnetic levitation
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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