나노압입과 나노리소그래피의 원자수준 전산모사Atomistic simulations of nanoindentation and nanolithography
- Advisors
- 임세영researcher; Im, Se-Youngresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2004
- Identifier
- 237924/325007 / 020023447
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2004.2, [ vii, 103 p. ]
- Keywords
전위; 나노리소그래피; 나노압입; 분자동역학; 박막; ultra-thin film; dislocation; Nanolithography; Nanoindentation; Molecular dynamics
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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