광간섭과 공초점 원리를 이용한 3차원 표면형상 정밀 측정에 관한 연구3D surface profile precision measurement by using optical interferometry and confocal microscopy
- Advisors
- 권대갑researcher; Gweon, Dae-Gabresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2003
- Identifier
- 180086/325007 / 020013667
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ v, 72 p. ]
- Keywords
형상; 공초점; 간섭; 표면; 측정; Measurement; Profile; Confocal; Interferometry; Surface
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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