VCM을 이용한 wafer용 xyθ 미세구동기의 설계와 제어 = The design and control of xyθ fine stage using VCM for wafer stage

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Advisors
권대갑researcherGweon, Dae-Gabresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2002
Identifier
173877/325007 / 020003061
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ vii, 76 p. ]

Keywords

최적설계; 개념설계; 미세구동기; VCM; 제어; control; optimal design; conceptual design; fine stage; VCM(Voice Coil Motor)

URI
http://hdl.handle.net/10203/45302
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=173877&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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