표면 형상측정을 위한 큰 등가파장 회절격자 간섭계Diffraction grating interferometer of large equivalent wavelength for surface flatness testing
- Advisors
- 김승우researcher; Kim, Seung-Wooresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2000
- Identifier
- 158273/325007 / 000983651
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2000.2, [ vi, 34 p. ]
- Keywords
기준측정평면; 표면 형상측정; 등가파장; 회절격자 간섭계; 등가파장보정; Equivalent wavelength calibration; Reference measurement plane; Surface flatness testing; Equivalent wavelength; Diffraction grating interferometer
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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