AFM scanner용 초정밀 XYZ 스테이지의 설계, 특성분석 및 제어에 관한 연구 = A precision XYZ-stage for AFM scanner design, analysis and control

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Advisors
권대갑researcherGweon, Dae-Gabresearcher
Description
한국과학기술원 : 기계공학과,
Publisher
한국과학기술원
Issue Date
1998
Identifier
133424/325007 / 000963342
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 기계공학과, 1998.2, [ vii, 63 p. ]

Keywords

최적설계; 압전소자; 원자현미경; 초정밀 3축 스테이지; PID제어; PID feedback controller; Optimal design; PZT; AFM; Precision XYZ-stage

URI
http://hdl.handle.net/10203/44978
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=133424&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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