레이저 간섭계의 직각평면거울에 대한 직각도 오차 측정Orthogonality measurement of square plane mirrors for laser interferometry

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Advisors
김승우researcherKim, Seung-Wooresearcher
Description
한국과학기술원 : 자동화및설계공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
113244/325007 / 000947521
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 자동화및설계공학과, 1997.2, [ v, 67 p. ]

Keywords

평면 거울 간섭기; 직각도 오차; 반전법; 원형 모아레 격자; Moire grating of concentric circles; Plane mirror interferometry; Orthogonality error; Reversal principle

URI
http://hdl.handle.net/10203/44370
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113244&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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