반도체 소자의 선폭 및 피치 측정과 불확도 산정에 관한 연구Linewidth and pitch measurement of semiconductor devices and uncertainty estimation

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dc.contributor.advisor김승우-
dc.contributor.advisorKim, Seung-Woo-
dc.contributor.author고영욱-
dc.contributor.authorKo, Yeoung-Uk-
dc.date.accessioned2011-12-14T05:16:36Z-
dc.date.available2011-12-14T05:16:36Z-
dc.date.issued1998-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143420&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/42928-
dc.description학위논문(박사) - 한국과학기술원 : 기계공학과, 1998.8, [ iii, 95 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject레이저 간섭계-
dc.subject주사 전자현미경-
dc.subject피치-
dc.subject선폭-
dc.subject정밀 스테이지-
dc.subjectPrecision stage-
dc.subjectLaser interferometer-
dc.subjectScanning electron microscope-
dc.subjectPitch-
dc.subjectLinewidth-
dc.title반도체 소자의 선폭 및 피치 측정과 불확도 산정에 관한 연구-
dc.title.alternativeLinewidth and pitch measurement of semiconductor devices and uncertainty estimation-
dc.typeThesis(Ph.D)-
dc.identifier.CNRN143420/325007-
dc.description.department한국과학기술원 : 기계공학과, -
dc.identifier.uid000935012-
dc.contributor.localauthor김승우-
dc.contributor.localauthorKim, Seung-Woo-
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ME-Theses_Ph.D.(박사논문)
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