반도체 소자의 선폭 및 피치 측정과 불확도 산정에 관한 연구 = Linewidth and pitch measurement of semiconductor devices and uncertainty estimation

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Advisors
김승우researcherKim, Seung-Wooresearcher
Description
한국과학기술원 : 기계공학과,
Publisher
한국과학기술원
Issue Date
1998
Identifier
143420/325007 / 000935012
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 기계공학과, 1998.8, [ iii, 95 p. ]

Keywords

레이저 간섭계; 주사 전자현미경; 피치; 선폭; 정밀 스테이지; Precision stage; Laser interferometer; Scanning electron microscope; Pitch; Linewidth

URI
http://hdl.handle.net/10203/42928
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=143420&flag=dissertation
Appears in Collection
ME-Theses_Ph.D.(박사논문)
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