다중 슬롯 클러스터 장비의 안정상태 스케줄링 분석Steady state scheduling analysis of multi-slot cluster tools
- Advisors
- 이태억researcher; Lee, Tae-Eogresearcher
- Description
- 한국과학기술원 : 산업공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2003
- Identifier
- 180233/325007 / 020013113
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 산업공학과, 2003, [ iii, 51 p. ]
- Keywords
다중 슬롯; 양팔 로봇; 스케줄링; 클러스터 장비; 안정상태; multi-slot; dual blade; dual gripper; scheduling; cluster tool
- Appears in Collection
- IE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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