Scheduling of a dual-armed cluster tool with two independently working robot arms = 독립적으로 움직이는 두 로봇 팔을 갖는 양팔 클러스터 장비의 스케줄링

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 374
  • Download : 0
In this thesis we propose a conceptual cluster tool design for two independently moving wafer handling robot arms inside a radial configuration cluster tool. We develop a Petri Net model which describes the tool behavior. Ways to model both 1-cyclic and 2-cyclic schedules are developed. It is shown that the Swap sequence is not unconditionally the optimal sequence. We identify three dominant types of sequences. The workload concept is extended. With this, conditions for optimality are introduced and optimality is proven. We develop an MIP formulation for the cases where the conditions for optimality are not satisfied. The MIP formulation finds optimal sequences amongst 1-cyclic schedules. It is shown that 1-cyclic schedules cannot always find the optimal schedule. Hence, a MIP formulation to find 2-cyclic optimal solutions is proposed. An efficient bounding mechanism still needs to be developed for the latter. We show experimental results for both. We show that using two independent arms can significantly reduce the cycle time of the tool and increase chamber utilization compared to the existing regular cluster tool architecture.
Advisors
Lee, Tae-Eogresearcher이태억researcher
Description
한국과학기술원 : 산업및시스템공학과,
Publisher
한국과학기술원
Issue Date
2010
Identifier
455162/325007  / 020094330
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 산업및시스템공학과, 2010.08, [ iv, 79 p. ]

Keywords

Tool Architecture; Petri Nets; Cluster Tools; Scheduling; 스케줄링; 아키텍쳐; 페트리넷; 클러스터 장비

URI
http://hdl.handle.net/10203/40882
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=455162&flag=dissertation
Appears in Collection
IE-Theses_Master(석사논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0