Heuristics for minimizing makespan on parallel dedicated machines with family setups = 셋업이 있는 병렬 전용 기계 공정에서의 최대 종료 시간을 최소화 하는 스케쥴링 알고리듬 개발

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This paper develops the heuristics for scheduling in a semiconductor wafer fabrication facility (fab) with machine dedication characteristic. Machine dedication in a fab is the characteristic that each machine can process only a set of specific product families. A setup operation is required between processings of wafer lots of different product families, and the length of the setup time is significantly long compared with processing times of wafer lots. This scheduling problem can be found at the etching, chemical vapor deposition and ion implant processing workstations. For the objective of minimizing makespan, we develop several heuristic algorithms. To evaluate performance of the suggested algorithms, a series of computational experiments are performed on a number of test problems and results show that the suggested algorithms give good solutions in a short amount of computation time.
Advisors
Kim, Young-Daeresearcher김영대researcher
Description
한국과학기술원 : 산업공학과,
Publisher
한국과학기술원
Issue Date
2007
Identifier
264231/325007  / 020053048
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 산업공학과, 2007.2, [ ii, 36 p. ]

Keywords

semiconductor manufacturing; heuristics; scheduling; parallel dedicated machines; 병렬 전용 기계; 반도체 생산; 휴리스틱; 스케쥴링

URI
http://hdl.handle.net/10203/40763
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=264231&flag=dissertation
Appears in Collection
IE-Theses_Master(석사논문)
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