DRAM storage capacitor용 고유전율 박막을 위한 Pt 하부전극에 관한 연구A study on Pt bottom electrode for high dielectric thin films of DRAM storage capacitor
- Advisors
- 이희철researcher; Lee, Hee-Chulresearcher
- Description
- 한국과학기술원 : 전기및전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 99295/325007 / 000933494
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1995.2, [ ii, 93 p. ]
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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