전자선 묘화와 반응성 이온 식각을 이용한 나노구조형성 및 나노구조의 기억소자 제작Formation of nano-structure and fabrication of nano-structure memory using E-beam lithography and reactive ion etching
- Advisors
- 신형철researcher; Shin, Hyung-Cheolresearcher
- Description
- 한국과학기술원 : 전기및전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1998
- Identifier
- 134828/325007 / 000963222
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1998.2, [ iii, 75 p. ]
- Keywords
RIE; 기억소자; Nano; 전자선묘화; E-beam lithography; RIE; Momory; Nano
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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