반응이온식각공정을 이용한 폴리머 광도파로 분할기의 제작Fabrication of polymeric waveguide splitters by $O_2$-reactive ion etching method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 신상영 | - |
| dc.contributor.advisor | Shin, Sang-Yung | - |
| dc.contributor.author | 이운영 | - |
| dc.contributor.author | Lee, Woon-Yeong | - |
| dc.date.accessioned | 2011-12-14T01:40:19Z | - |
| dc.date.available | 2011-12-14T01:40:19Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=114240&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/36941 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1997.2, [ iii, 51 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 다중모드간섭 | - |
| dc.subject | 반응이온식각 | - |
| dc.subject | 폴리머 | - |
| dc.subject | 광분할기 | - |
| dc.subject | Optical splitter | - |
| dc.subject | MMI | - |
| dc.subject | RIE | - |
| dc.subject | Polymer | - |
| dc.title | 반응이온식각공정을 이용한 폴리머 광도파로 분할기의 제작 | - |
| dc.title.alternative | Fabrication of polymeric waveguide splitters by $O_2$-reactive ion etching method | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 114240/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
| dc.identifier.uid | 000953459 | - |
| dc.contributor.localauthor | 신상영 | - |
| dc.contributor.localauthor | Shin, Sang-Yung | - |
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- EE-Theses_Master(석사논문)
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