학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 1995.8, [ iv, 166 p. ]
Polysilicon; Low Temperature; Plasma Oxide; ECR; TFT; 안정성; 박막트랜지스터; 다결정실리콘; 저온; 플라즈마 산화막; Stability
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