Electrical/optical multimodal sensor using multi-functional 3D nano-architecture materials and manufacturing method thereof

Abstract

A multimodal sensor of high sensitivity and high selectivity using multifunctional three-dimensional nanostructure having electric and optical sensing ability and a method thereof are provided. The method includes forming multi-layered nanowires including a multifunctional material, transferring the nanowires to a plurality of layers onto a target substrate to form the three-dimensional nanostructure, heat-treating the three-dimensional nanostructure, and forming electrode layers at the three-dimensional nanostructure.