Light-activated gas sensor based on 3D nanostructure operable at low temperature with high performance and method for manufacturing the same

Abstract

A gas sensor includes a first electrode disposed on a substrate, a second electrode disposed on the substrate and spaced apart from the first electrode, and a sensitive member disposed on the substrate. The sensitive member contacts first and second electrodes and has a porous structure from a three-dimensional (3D) arrangement of shells including a gas-sensitive material. A thickness of the sensitive member is 5 μm to 10 μm, and a thickness of the shells is 10 nm to 40 nm