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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Mechanical Properties of TEOS Thin Film

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Kim, Hyeong Jun / Kim, Dong Jun / Kim, Taek-Sooresearcher
Publisher
EuraSEM - European Society of Experimental Mechanics
Issue Date
2023-07-06
Language
English
Citation

ICEM20 - 20th International Conference on Experimental Mechanics

URI
http://hdl.handle.net/10203/317456
Appears in Collection
ME-Conference Papers(학술회의논문)
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