Design parameters of free-form color splitters for subwavelength pixelated image sensors

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Metasurface-based color splitters are emerging as next-generation optical components for image sensors, replacing classical color filters and microlens arrays. In this work, we report how the design parameters such as the device dimensions and refractive indices of the dielectrics affect the optical efficiency of the color splitters. Also, we report how the design grid resolution parameters affect the optical efficiency and discover that the fabrication of a color splitter is possible even in legacy fabrication facilities with low structure resolutions.
Publisher
CELL PRESS
Issue Date
2023-10
Language
English
Article Type
Article
Citation

ISCIENCE, v.26, no.10

DOI
10.1016/j.isci.2023.107788
URI
http://hdl.handle.net/10203/314590
Appears in Collection
EE-Journal Papers(저널논문)
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