Large-area thickness measurement of transparent multi-layer films based on laser confocal reflection sensor

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It is critical to maintain uniform coating thicknesses over large area in order to manufacture high-quality coated transparent films. Optical thickness measurement technique gives relatively short measurement time and non-destructive measurement. Among the available optical techniques, a laser confocal method that detects reflected light at the interfaces between layers provides highly reliable and accurate height information. Because confocal sensors utilize focusing optics, both the numerical aperture of the focusing lens and refractive index of the film material must be considered when calibrating the actual thickness from the recorded displacement of the focusing lens. In this paper, we proposed a measurement method calibrated for the actual thickness of single- and double-layer transparent films. Also, we developed a large-area thickness measurement system for transparent substrates and the uniformity of hardcoated samples is evaluated using the laser confocal reflection sensor. Experimental results are compared with the thickness measured using a mechanical thickness gauge. (C) 2019 Published by Elsevier Ltd.
Publisher
ELSEVIER SCI LTD
Issue Date
2020-03
Language
English
Article Type
Article
Citation

MEASUREMENT, v.153

ISSN
0263-2241
DOI
10.1016/j.measurement.2019.107390
URI
http://hdl.handle.net/10203/272238
Appears in Collection
ME-Journal Papers(저널논문)
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