DSpace at KOASAS: 광빗 위상분광 기반 피코미터 분해능의 미세변위 측정기술

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

광빗 위상분광 기반 피코미터 분해능의 미세변위 측정기술

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Nguyen, Anh / 김영진 / 천병재 / 김승우 researcher

Publisher: 2019 한국정밀공학회 추계학술대회

Issue Date: 2019-10-31

Language: Korean

Citation: 2019 한국정밀공학회 추계학술대회

URI: http://hdl.handle.net/10203/271513

Appears in Collection: ME-Conference Papers(학술회의논문)

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광빗 위상분광 기반 피코미터 분해능의 미세변위 측정기술

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