Two-dimensional Laser Drilling Using the Superposition of Orthogonally Polarized Images from Two Computer-generated Holograms

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Laser processing using holograms can greatly improve processing speed, by spatially distributing the laser energy on the target material. However, it is difficult to reconstruct an image with arrays of closely spaced spots for laser processing, because the specklelike interference pattern prevents the spots from getting close to each other. To resolve this problem, a line target was divided in two, reconstructed with orthogonally polarized beams, and then superposed. Their optical reconstruction was performed by computer-generated holograms and a pulsed laser. With this method, we performed two-dimensional (2D) laser drilling of polyimide film, with a kerf width of 20 mu m and a total processing length of 20 mm.
Publisher
OPTICAL SOC KOREA
Issue Date
2019-10
Language
English
Article Type
Article
Citation

CURRENT OPTICS AND PHOTONICS, v.3, no.5, pp.451 - 457

ISSN
2508-7266
DOI
10.3807/COPP.2019.3.5.451
URI
http://hdl.handle.net/10203/268915
Appears in Collection
PH-Journal Papers(저널논문)
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