DC Field | Value | Language |
---|---|---|
dc.contributor.author | Je, Jinsol | ko |
dc.contributor.author | Song, Jungki | ko |
dc.contributor.author | Lee, Bong Jae | ko |
dc.contributor.author | Lee, Jungchul | ko |
dc.date.accessioned | 2019-10-31T08:20:23Z | - |
dc.date.available | 2019-10-31T08:20:23Z | - |
dc.date.created | 2019-10-31 | - |
dc.date.created | 2019-10-31 | - |
dc.date.issued | 2019-10 | - |
dc.identifier.citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.28, no.5, pp.865 - 868 | - |
dc.identifier.issn | 1057-7157 | - |
dc.identifier.uri | http://hdl.handle.net/10203/268098 | - |
dc.description.abstract | This paper reports a novel fabrication method for multiscale fluidic channels ranging from sub-20 nm to a few mu m in their hydraulic diameters, D-h, exhibiting height-to-width ratio [or aspect ratio (AR)] close to unity only relying on internal oxidation and oxide etching of self-assembled silicon-on-nothing (SON) structures. We find that internal oxidation occurs uniformly along the longitudinal direction of the SON microchannels and time-controlled thermal oxidation can offer nanochannels with the minimum D-h of similar to 10 nm. Third, the enlarged circular microchannels with the maximum D-h of similar to 4500 nm are achieved through wet etching of internal silicon dioxide. The smallest nanochannel demonstrated exhibits the length-to-diameter ratio of similar to 60 000 and the ratio of the largest microchannel cross section to the smallest nanochannel cross section is similar to 200 000. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.title | Multiscale Fluidic Channels via Internal Oxidation and Oxide Etching of Self-Assembled Silicon-on-Nothing Structures | - |
dc.type | Article | - |
dc.identifier.wosid | 000489837100016 | - |
dc.identifier.scopusid | 2-s2.0-85077733115 | - |
dc.type.rims | ART | - |
dc.citation.volume | 28 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 865 | - |
dc.citation.endingpage | 868 | - |
dc.citation.publicationname | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | - |
dc.identifier.doi | 10.1109/JMEMS.2019.2926378 | - |
dc.contributor.localauthor | Lee, Bong Jae | - |
dc.contributor.localauthor | Lee, Jungchul | - |
dc.contributor.nonIdAuthor | Je, Jinsol | - |
dc.contributor.nonIdAuthor | Song, Jungki | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Multiscale channel | - |
dc.subject.keywordAuthor | microchannel | - |
dc.subject.keywordAuthor | nanochannel | - |
dc.subject.keywordAuthor | silicon-on-nothing (SON) | - |
dc.subject.keywordPlus | 2-DIMENSIONAL THERMAL-OXIDATION | - |
dc.subject.keywordPlus | NANOFABRICATION | - |
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