PATTERN STRUCTURE INSPECTION DEVICE AND INSPECTION METHOD 패턴 구조물 검사 장치 및 검사 방법

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dc.contributor.authorPark, Yong Keunko
dc.contributor.authorPark, Jongchanko
dc.date.accessioned2019-07-24T06:20:06Z-
dc.date.available2019-07-24T06:20:06Z-
dc.date.issued2019-04-10-
dc.identifier.urihttp://hdl.handle.net/10203/263773-
dc.titlePATTERN STRUCTURE INSPECTION DEVICE AND INSPECTION METHOD-
dc.title.alternative패턴 구조물 검사 장치 및 검사 방법-
dc.typePatent-
dc.type.rimsPAT-
dc.contributor.localauthorPark, Yong Keun-
dc.contributor.assigneeKAIST, The Wave Talk, Inc.-
dc.identifier.iprsType특허-
dc.identifier.patentApplicationNumber17807037.1-
dc.identifier.patentRegistrationNumber3467483-
dc.date.application2017-06-01-
dc.date.registration2019-04-10-
dc.publisher.countryEI-
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PH-Patent(특허)
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