Vertically aligned carbon nanopillars with size and spacing control for a transparent field emission display

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A top-down fabrication method is presented for vertically aligned carbon nanopillars (CNPs) using photolithography and pyrolysis. The modified backside exposure method of photolithography fabricates vertically aligned polymer (SU-8) nanopillars. The pyrolysis process, which transforms the polymer to amorphous carbon, reliably produces vertically aligned CNPs with widths ranging from 100 to 400 nm. The CNPs can be used as a transparent field emission cathode for a transparent display and light emission is observed.
Publisher
IOP PUBLISHING LTD
Issue Date
2013-01
Language
English
Article Type
Article
Keywords

C-MEMS; NANOTUBES; NANOWIRES; GROWTH; ARRAY

Citation

NANOTECHNOLOGY, v.24, no.2

ISSN
0957-4484
DOI
10.1088/0957-4484/24/2/025301
URI
http://hdl.handle.net/10203/255290
Appears in Collection
ME-Journal Papers(저널논문)
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