Piezoelectric actuator and method of measuring motion by using the same 압전 구동 장치 및 이를 이용한 움직임 측정 방법

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A piezoelectric actuator and a method of measuring a motion by using the piezoelectric actuator are provided. The piezoelectric actuator includes: a movable member that is disposed to face the fixed member; a piezoelectric element that is disposed between the fixed member and the movable member, and configured to operate in a shear mode based on input voltages applied to the piezoelectric element and move the movable member relative to the fixed member; and a position sensor that is disposed between the piezoelectric element and the movable member, and configured to measure a motion of the movable member.
Assignee
SAMSUNG ELECTRONICS CO LTD, KAIST
Country
US (United States)
Issue Date
2018-11-13
Application Date
2015-04-27
Application Number
14697038
Registration Date
2018-11-13
Registration Number
10,126,146
URI
http://hdl.handle.net/10203/254923
Appears in Collection
PH-Patent(특허)
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