DC Field | Value | Language |
---|---|---|
dc.contributor.author | Teo, Adrian J. T. | ko |
dc.contributor.author | Li, Holden King-Ho | ko |
dc.contributor.author | Tan, Say Hwa | ko |
dc.contributor.author | Yoon, Yong-Jin | ko |
dc.date.accessioned | 2018-09-18T06:39:23Z | - |
dc.date.available | 2018-09-18T06:39:23Z | - |
dc.date.created | 2018-09-10 | - |
dc.date.created | 2018-09-10 | - |
dc.date.created | 2018-09-10 | - |
dc.date.issued | 2018-01 | - |
dc.identifier.citation | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.24, no.1, pp.465 - 472 | - |
dc.identifier.issn | 0946-7076 | - |
dc.identifier.uri | http://hdl.handle.net/10203/245715 | - |
dc.description.abstract | With optimization being vital, the design optimization of a silicon-on-insulator (SOI) micro-opto-electro-mechanical systems accelerometer is discussed in this paper. This process has enabled a simplistic design that employs double-sided deep reactive ion etching (DRIE) on SOI wafer to be able to attain high sensitivity of 294 A mu W/G with a calculated proof mass displacement of 0.066 A mu m/G which was close to ANSYS simulated results of 0.061 A mu m/G. Optimization has also enabled an in-depth study of the effects of the different variables on the overall performance of the device. | - |
dc.language | English | - |
dc.publisher | SPRINGER | - |
dc.subject | MEMS | - |
dc.subject | SILICON | - |
dc.title | Design optimization for an SOI MOEMS accelerometer | - |
dc.type | Article | - |
dc.identifier.wosid | 000423320800050 | - |
dc.identifier.scopusid | 2-s2.0-85040978383 | - |
dc.type.rims | ART | - |
dc.citation.volume | 24 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 465 | - |
dc.citation.endingpage | 472 | - |
dc.citation.publicationname | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | - |
dc.identifier.doi | 10.1007/s00542-017-3370-4 | - |
dc.contributor.localauthor | Yoon, Yong-Jin | - |
dc.contributor.nonIdAuthor | Teo, Adrian J. T. | - |
dc.contributor.nonIdAuthor | Li, Holden King-Ho | - |
dc.contributor.nonIdAuthor | Tan, Say Hwa | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | MEMS | - |
dc.subject.keywordPlus | SILICON | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.