Facile Batch Fabrication of Hydrogel Atomic Force Microscope Cantilevers via Capillary Filling and Ultraviolet Curing in an Aligned Elastomeric Mold Pair

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This letter reports the facile batch fabrication of hydrogel (polyethyleneglycol diacrylate; PEGDA) atomic force microscope (AFM) cantilevers via capillary filling and ultraviolet curing in an aligned polydimethylsiloxane (PDMS) mold pair. One mold exhibits the tip and beam structures, and the other mold exhibits the base structure. Once two PDMS molds are aligned, PEGDA prepolymer capillary-driven into the mold pair is solidified by a single UV exposure and 15 PEGDA AFM cantilevers with their tip radii of similar to 200 nm are fabricated simultaneously. After oxygen plasma treatment sharpens imaging tips down to similar to 50 nm, reflective metal is selectively deposited onto 15 cantilevers via a laser-machined shadow mask. Finally, each PEGDA AFM cantilever is easily individualized. Fabricated PEGDA AFM cantilevers are thoroughly characterized and used for nanoscale imaging of HeLa cells, calibration gratings, and DVD media.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2017-06
Language
English
Article Type
Article
Keywords

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Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.26, no.3, pp.504 - 506

ISSN
1057-7157
DOI
10.1109/JMEMS.2017.2675946
URI
http://hdl.handle.net/10203/245446
Appears in Collection
ME-Journal Papers(저널논문)
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