A Low Contact Resistance 4-Terminal Mems Relay: Theoretical Analysis, Design, and Demonstration

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A 4-terminal microelectromechanical systems (MEMS) relay has long been sought for signal switching applications because it allows de-coupling of the actuation (body and gate) and signal (source and drain) components unlike a 3-terminal MEMS relay. However, the contact resistance still remains a serious problem in current 4-terminal MEMS relays compared with the 3-terminal MEMS relays. In this paper, using theoretical analysis, we first determined that the two-contact design, which was the most common design in the 4-terminal MEMS relay, was the origin of the high contact resistance. We subsequently developed a 4-terminal MEMS relay with a novel single-contact design. The fabricated 4-terminal MEMS relay with the single-contact design exhibited a contact resistance of 18 m Omega. To the best of our knowledge, this result is the lowest value among 4-terminal MEMS relays. In addition, we demonstrated that the two-contacts are the origin of the high contact resistance using measurement. The relay operated up to 1.1 x 10(6) cycles at 1 V / 50 mA in air and hot switching conditions. Finally, the proposed 4-terminal MEMS relay was hermetically packaged for use in commercial applications.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2018-06
Language
English
Article Type
Article
Keywords

POWER APPLICATIONS; SWITCH; CIRCUITS; DEVICES

Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.27, no.3, pp.497 - 505

ISSN
1057-7157
DOI
10.1109/JMEMS.2018.2822402
URI
http://hdl.handle.net/10203/244017
Appears in Collection
EE-Journal Papers(저널논문)
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