Monolithic integration of self-aligned nanoisland laser with shifted-air-hole waveguide

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We report a novel scheme for monolithic integration of a nanoisland laser with a shifted-air-hole waveguide by employing selective etching techniques. An active L3 laser cavity and passive shifted-air-hole waveguide are simultaneously formed through a single fabrication step. In the shifted-air-hole waveguide, the air-hole position is adjusted to be compatible with selective etching. The spectral overlap between the L3 laser resonance and guided mode is achieved by introducing small air holes at the nodes of the shifted-air-hole waveguide. Experiments show that >60% of the light is coupled from the nanoisland laser to the end of the 12-mu m-long waveguide. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Publisher
OPTICAL SOC AMER
Issue Date
2018-05
Language
English
Article Type
Article
Citation

OPTICS EXPRESS, v.26, no.10, pp.12569 - 12578

ISSN
1094-4087
DOI
10.1364/OE.26.012569
URI
http://hdl.handle.net/10203/243715
Appears in Collection
PH-Journal Papers(저널논문)
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