3D profiling of rough silicon carbide surfaces by coherence scanning interferometry using a femtosecond laser

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We test an erbium-doped fiber femtosecond laser for its potential as a light source for a coherence scanning interferometer for large field-of-view profiling of rough silicon carbide (SiC) surfaces. This infrared fiber pulse laser is able to provide a relatively long temporal coherence length of similar to 30 mu m to be appropriate for coherence scanning of rough surfaces. At the same time, it offers a high degree of spatial coherence comparable to that of a monochromatic continuous wave laser to achieve a large measurement field of view. In addition, the highly maintained linear polarization of the pulse laser source permits overcoming the low specular reflectance of rough SiC surfaces by polarization-based optical power splitting control between the reference and measurement arms. (c) 2018 Optical Society of America
Publisher
OPTICAL SOC AMER
Issue Date
2018-03
Language
English
Article Type
Article
Citation

APPLIED OPTICS, v.57, no.10, pp.2584 - 2589

ISSN
1559-128X
DOI
10.1364/AO.57.002584
URI
http://hdl.handle.net/10203/241506
Appears in Collection
ME-Journal Papers(저널논문)
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