Large-Scale Polarization-Insensitive Silicon Photonic MEMS Switches

We report on 50 x 50 silicon photonic micro-electromechanical-system (MEMS) switches with reduced polarization dependence. The switches make use of two-level waveguide crossbars and MEMS-actuated adiabatic couplers. Simulations indicate that by eliminating all polarization-dependent elements (e.g., waveguide crossings), low polarization-dependent losses (<1 dB) can be realized. An experimental prototype switch was fabricated by bonding two silicon-on-insulator wafers. A polarization-dependent loss of 8.5 dB and a polarization-dependent delay of 44 ps were measured. The extinction ratios are greater than 40 dB for both polarizations. With improved fabrication, total on-chip loss <2 dB can potentially be achieved for both polarizations.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2018-05
Language
English
Article Type
Article
Keywords

WIRE PILOSS SWITCH; OPTICAL SWITCH; DIVERSITY; COUPLERS; COMPACT

Citation

JOURNAL OF LIGHTWAVE TECHNOLOGY, v.36, no.10, pp.1824 - 1830

ISSN
0733-8724
DOI
10.1109/JLT.2018.2791502
URI
http://hdl.handle.net/10203/241195
Appears in Collection
EE-Journal Papers(저널논문)
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