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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Ge 기반의 소자에서 Y-ZrO2 게이트 유전체를 이용한 EOT 스케일링(~5.7 A) 및 누설 전류와 계면 트랩의 감소

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Lee, Tae In / Kim, Min Ju / Manh-Cuong Nguyen / Ahn, Hyunjun / Moon, Jung Min / Lee, Tae Yoon / Yu, Hyun-Young / Choi, Rino / Hwang, Wan Sik / Cho, Byung-Jinresearcher
Publisher
서강대학교
Issue Date
2018-02-07
Language
Korean
Citation

제25회 한국반도체학술대회

URI
http://hdl.handle.net/10203/240672
Appears in Collection
EE-Conference Papers(학술회의논문)
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