Apparatus and method for forming a film on a tape substrate 띠형 기판상의 박막 형성 장치 및 박막형성방법

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 76
  • Download : 0
This invention relates to an apparatus and method for forming a high temperature superconducting film on a tape substrate. In this invention, the superconducting film is deposited on the tape substrate wound around a cylindrical substrate holder inserted in an auxiliary chamber. The holder rotates during the whole deposition process. Vapors of film materials are supplied from a main chamber through an opening between the two chambers. According to the present invention, it is possible to form a highly uniform high temperature superconducting film on a tape substrate at high speeds suitable for large scale production. The manufacturing speed can easily be controlled by the size of the substrate holder.
Assignee
KAIST
Country
US (United States)
Issue Date
2000-11-14
Application Date
1999-09-29
Application Number
09407892
Registration Date
2000-11-14
Registration Number
6147033
URI
http://hdl.handle.net/10203/233748
Appears in Collection
PH-Patent(특허)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0