Multi-electrode에서의 원활한 gas공급을 위한 shower head 및 절연체의 구조제안 Gas supply enhancement using the shower head through the electrical insulator

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 144
  • Download : 0
Disclose a kind of plasma producing apparatus i.e. substrate board treatment.Described plasma producing apparatus includes: be arranged on multiple earth electrodes that vacuum tank is internal and extends parallel to one another;And the power electrode being arranged between earth electrode.There are the region of constant distance between earth electrode and power electrode, power electrode is being tapered on the direction of substrate.Power electrode is connected to RF power source, and on the direction of substrate, the height of power electrode is more than the height of earth electrode.
Assignee
KAIST
Country
CC (Cocos Islands)
Issue Date
2016-09-07
Application Date
2012-03-29
Application Number
2012-80016017
Registration Date
2016-09-07
Registration Number
103444269
URI
http://hdl.handle.net/10203/230029
Appears in Collection
PH-Patent(특허)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0