Investigation of thermomechanical motion in a nanomechanical resonator based on optical intensity mapping

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Measurement of reflected optical light from the surface of microscopic structures can offer a precise tool to investigate the oscillatory motion of micro- and nano-mechanical resonators. We demonstrate an optical investigation of multiple flexural modes of a nanomechanical resonator in thermal motion based on amplitude-modulated laser light, with higher-order resonant modes up to 17 MHz measured with this technique. Scanning focused laser light reproduces the mode shape of each flexural mode, and theoretical estimation of measurement sensitivity shows a displacement sensitivity of 10 (-15) m/Hz(1/2). For nanomechanical devices incompatible with interferometric systems, this technique can exhibit sufficient sensitivity to explore small motional states.
Publisher
KOREAN PHYSICAL SOC
Issue Date
2017-11
Language
English
Article Type
Article
Keywords

QUANTUM GROUND-STATE; GRAVITATIONAL-WAVE DETECTORS; MASS SENSOR; SILICON; SYSTEMS; NOISE

Citation

JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.71, no.10, pp.684 - 691

ISSN
0374-4884
DOI
10.3938/jkps.71.733
URI
http://hdl.handle.net/10203/228592
Appears in Collection
RIMS Journal Papers
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