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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

개시제를 통한 고분자 기상증착기법을 활용한 다공성 초절연물질 (k = 2.0) 표면 실링 방법

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윤성준 / 박관용 / 남태욱 / Yoon, Alexander / 김형준 / 임성갑researcher / 조병진researcher
Publisher
SK Hynix
Issue Date
2017-02-15
Language
Korean
Citation

24th Korean Conference on Semiconductors

URI
http://hdl.handle.net/10203/224397
Appears in Collection
CBE-Conference Papers(학술회의논문)EE-Conference Papers(학술회의논문)
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