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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Graphene based Cu diffusion barrier

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김재환 / 윤성준 / 봉재훈 / Yoon, Alexander / 조병진researcher
Publisher
SK Hynix
Issue Date
2017-02-15
Language
English
Citation

24th Korean Conference on Semiconductors

URI
http://hdl.handle.net/10203/224395
Appears in Collection
EE-Conference Papers(학술회의논문)
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